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WaferHome can manufacture the high quality FZ/MCZ Growth Siliocn Wafer

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Specification for FZ/MCZ Growth Siliocn Wafer


Grade（等级）	Dimeter（直径）	Type/dopant（类型/掺杂）	Orientaion	carborn 10*E-6	oxygen 10*E-6	lifetime /us	thickness（厚度）	Resistivity（电阻率）	Flat	Surface/Roughness（表面粗糙度）	Geometric parameter
FZ growth prime wafer	25.4mm 50.8mm 76.5mm	P(Boron) N(Phos/As/Sb) intrinsic	<100> <111> or special orientation	<=0.2	<=0.1	300 - 1*10E4	400um+/-20 400um+/- 20 400um+/-20	1 - 100000 Ohm-cm /Customization	N/A 16mm 22.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um
	100mm 125mm 150mm	P(Boron) N(Phos/As/Sb) intrinsic	<100> <111> or special orientation	<=0.2	<=0.1	300 - 1*10E4	525um+/-20 625um+/-20 625um+/-20	1 - 100000 Ohm-cm /Customization	32.5mm 42.5mm 57.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um
	200mm	P(Boron) N(Phos/As/Sb) intrinsic	<100> <111> or special orientation	<=0.2	<=0.1	300 - 1*10E4	725um+/-20	1 - 100000 Ohm-cm /Customization	nothch/flat	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um
	300mm	P(Boron) N(Phos/As/Sb) intrinsic	<100> <111> or special orientation	<=0.2	<=0.1	300 - 1*10E4	775um+/-20	1 - 100000 Ohm-cm /Customization	notch/flat	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um
MCZ growth prime wafer	25.4mm 50.8mm 76.5mm	P(Boron) N(Phos/As/Sb) intrinsic	<100> <111> or special orientation	5 - 15	<=0.2	50 - 1*10E4	200um+/- 20 100um+/-20 customization	1 - 500 Ohm-cm /Customization	N/A 16mm 22.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um
	100mm 125mm 150mm	P(Boron) N(Phos/As/Sb) intrinsic	<100> <111> or special orientation	5 - 15	<=0.2	50 - 1*10E4	100um+/-20 200um+/- 20 customization	1 - 500 Ohm-cm /Customization	32.5mm 42.5mm 57.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um
	200mm	P(Boron) N(Phos/As/Sb) intrinsic	<100> <111> or special orientation	5 - 15	<=0.2	50 - 1*10E4	100um+/-20 200um+/- 20 customization	1 - 500 Ohm-cm /Customization	notch/flat	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um
	300mm	P(Boron) N(Phos/As/Sb) intrinsic	<100> <111> or special orientation	5 - 15	<=0.2	50 - 1*10E4	100um+/-20 200um+/- 20 customization	1 - 500 Ohm-cm /Customization	notch/flat	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um